Red surface emitting laser element, image forming device, and image display apparatus

ABSTRACT

A red surface emitting laser element includes a first reflector, a second reflector including a p-type semiconductor multilayer film, an active layer between the first reflector and the second reflector, and a p-type semiconductor spacer layer between the active layer and the second reflector, the p-type semiconductor spacer layer having a thickness of 100 nm or more and 350 nm or less.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a red surface emitting laser elementand an image forming device and an image display apparatus incorporatingthe red surface emitting laser element.

2. Description of the Related Art

A. Usefulness of Red Surface Emitting Laser Element

A surface emitting laser element (in particular, a surface emittinglaser of a vertical cavity type is called a vertical cavity surfaceemitting laser (VCSEL)) can output light in a direction perpendicular tothe surface direction of the semiconductor substrate and can relativelyeasily be formed as a two dimensional array.

When the element is formed as a two dimensional array, parallelprocessing is realized by multiple beams emitted therefrom. Thus,application of this two dimensional array technology to variousindustrial usages is desired to achieve a higher density and a higherspeed.

For example, the surface emitting laser array may be used as an exposurelight source of an electrophotographic printer so that the printing ratecan be increased by parallel processing of the printing step usingmultiple beams.

A surface emitting laser currently put into practice is an element thatoutputs a laser beam in the infrared region (wavelength λ=0.75 μm to 1μm). If the oscillation wavelength is further shortened, the beamdiameter can be further reduced and an image with a higher resolutioncan be obtained.

A red surface emitting laser element outputs light having a wavelength(about 0.6 μm to about 0.73 μm) shorter than that in the infraredregion. Moreover, at this wavelength, the sensitivity of amorphoussilicon applicable to a photosensitive drum of an electrophotographicprinter is very high.

Thus, red surface emitting lasers are now desired to be put intopractical for use in photosensitive drums composed of amorphous siliconto achieve higher speed, higher resolution image printing.

The effect brought about by the combination of an increase in resolutionby shorter wavelength and multi-beam parallel processing issignificantly large. This combination is expected to make contributionsin various fields including electrophotographic printers and imagedisplay apparatuses such as laser displays.

B. Basic Structure of Red Surface Emitting Laser

In order to generate light having a wavelength in the red region, asemiconductor material, AlGaInP is typically used. The lattice of thismaterial matches with the lattice of GaAs, which is the materialconstituting the deposition substrate, and the bandgap energy can becontrolled by varying the compositional ratios of aluminum and gallium.

In order to generate laser oscillation, a threshold current or highermust be injected to the laser element. Current injection allowscarriers, such as electrons or holes, to be injected to the activelayer, and the carriers are eventually converted to light as theyundergo radiative recombination.

C. Specific Examples of Related Art

A red surface emitting laser is formed by interposing a resonator regionincluding an AlGaInP active layer between multilayered reflectorscomposed of a different semiconductor material, AlGaAs, A GaAs substratewhose lattice matches with those of the active layer and themultilayered reflectors is used as the substrate.

In 1995, a group led by Crawford of Sandia National Laboratoriesdisclosed the element structure of a 1-wavelength resonator structure(see M. H. Crawford et al., IEEE PHOTONICS TECHNOLOGY LETTERS, Vol. 7,No. 7 (1995), 724, hereinafter referred to as “Crawford reference”).

This one wave resonator structure has the most widely used cavity lengthin surface emitting lasers that output infrared emission. In red surfaceemitting lasers, the 1 wavelength cavity length is about 200 nm (in thecase where the wavelength is 680 nm) in terms of layer thickness.

In particular, an active layer having a multiquantum well structure 40nm to 50 nm in thickness is disposed in the central region of the1-wavelength cavity length. A p-type AlGaInP layer and an n-type AlGaInPlayer which each function as a spacer layer and have a thickness of 80nm or less are disposed on both sides of the active layer.

In some cases, an undoped spacer layer is disposed between the activelayer and the doped p-type (or n-type) spacer layer. In such cases, thethickness of the p-type (or n-type) AlGaInP spacer layer is about 50 nm.

In Crawford reference, the thickness of the p-type or n-type AlGaInPlayer is about 50 nm.

Crawford reference also teaches that the maximum light output power at a675 nm mode is 2.8 mW (20° C.) from the element with 15 μmφ oxideaperture.

SUMMARY OF THE INVENTION

In using a red surface emitting laser element as an electrophotographiclight source, high performance characteristics at high temperature arerequired.

However, Crawford reference discloses that according to its elementstructure, the maximum light output power decreases significantly if theambient temperature rises from 20° C. to 40° C. In particular, in a 675nm mode, the maximum light output power decreases to about 1.0 mW (anoutput decrease down to less than 40%).

The present inventors have found that when the amount of currentinjected is increased to enhance the output operation, the temperatureinside the element increases to 20° C. or more with the increasingcurrent injection although the ambient temperature is 20° C. In suchcases, the light output power does not increase but may decrease withthe increase in amount of current injection. Thus, the maximum lightoutput power is limited.

It is presumed that such a decrease in light output power occurs becausethe leakage current, which does not contribute to emission, increasessignificantly with temperature elevation.

A novel red surface emitting laser element that can decrease the amountof leakage current and an image forming device or image displayapparatus incorporating such a red surface emitting laser element aredesired.

A first aspect of the present invention provides a red surface emittinglaser element that includes a first reflector, a second reflectorincluding a p-type semiconductor multilayer film, an active layerbetween the first reflector and the second reflector, and a p-typesemiconductor spacer layer between the active layer and the secondreflector, wherein the p-type semiconductor spacer layer has a thicknessof 100 nm or more and 350 nm or less.

A second aspect of the present invention provides a red surface emittinglaser element that includes a first reflector, a second reflectorincluding a p-type AlGaAs semiconductor multilayer film, an active layerbetween the first reflector and the second reflector, and a p-type AlInPsemiconductor spacer layer or a p-type AlGaInP semiconductor spacerlayer having a thickness of 100 nm or more and 350 nm or less betweenthe active layer and the second reflector.

A third aspect of the present invention provides a red surface emittinglaser element that includes a first reflector, a second reflectorincluding a p-type semiconductor multilayer film, an active layerbetween the first reflector and the second reflector, and a p-typesemiconductor spacer layer between the active layer and the secondreflector. In the red surface emitting laser element, the conductionband edge at X point of the p-type semiconductor multilayer film islower than the conduction band edge at X point of the p-typesemiconductor spacer layer, and the thickness of the p-typesemiconductor spacer layer is 100 nm or more and 350 nm or less.

An image forming device and an image display apparatus are alsoprovided. Each includes any one of the red surface emitting laserelements described above and a deflector for deflecting the laser beamoutput from the laser element to conduct scanning.

A novel red surface emitting laser element in which the leakage currentis reduced and an image forming device and an image display apparatusincluding the red surface emitting laser element are provided.

Further features of the present invention will become apparent from thefollowing description of exemplary embodiments with reference to theattached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a band diagram showing lineups of band edges of an activelayer, a p-type semiconductor spacer layer, and a p-type semiconductormultilayer film region of a red surface emitting laser.

FIG. 2A shows the relationship between the normalized leakage currentand the thickness of the p-type semiconductor spacer layer, and FIG. 2Bshows the relationship between the optical loss inside the resonator andthe thickness of the p-type semiconductor spacer layer.

FIG. 3 is a schematic cross-sectional view showing a layer structure ofa red surface emitting laser according to a first embodiment.

FIG. 4 is a schematic cross-sectional view showing a resonator structureof Example 1.

FIG. 5 is a schematic cross-sectional view of a laser element of Example1.

FIG. 6 is a band diagram cited from Schneider reference.

FIG. 7 is a schematic cross-sectional view showing a layer structure ofa red surface emitting laser of Example 2.

FIG. 8 is a schematic cross-sectional view showing a resonator structureof Example 2.

FIGS. 9A and 9B are schematic diagrams of an image-forming device.

FIG. 10 is a schematic cross-sectional view showing a resonatorstructure of Example 4.

FIG. 11 is a schematic diagram of an image display apparatus.

FIG. 12 is a graph showing temperature characteristics of an element ofExample 5.

DESCRIPTION OF THE EMBODIMENTS

As described above, a red surface emitting laser element having astructure described in Crawford reference undergoes significantdegradation in performance characteristics at high temperature.

The present inventors have assumed that the causes thereof are the rapidincrease in amount of leakage current due to heat and a drastic drop inluminous efficiency resulting from such a rapid increase in amount ofleakage current.

FIG. 6 is the band diagram described in R. P. Schneider et al., IEEEPHOTONICS TECHNOLOGY LETTERS, Vol. 6, No. 3 (1994) 313 (hereinafterreferred to as “Schneider reference”) related to the red VCSEL as withthe Crawford reference.

In particular, FIG. 6 shows a band diagram of an active layer, AlInPspacer layers (the spacer layers are sometimes referred to as claddinglayers), and distributed Bragg reflector (DBR) regions constituted bysemiconductor multilayer films that function as reflectors(AlAs/Al_(0.5)Ga_(0.5)As multilayer films). DBRs are used as reflectorsof a resonator.

FIG. 6 shows that the conduction band edges (the CB side in FIG. 6) ofthe constituent elements of the DBR regions are higher than the bandedges of AlInP constituting the spacer layers.

In other words, this diagram shows that the electrons that overflowedthe hetero barrier between the active layer and the AlInP spacer layerrarely diffuse over the thickness of the AlInP layer.

On the other hand, the element structure disclosed in the Crawfordreference includes an active layer, a p-type Al_(0.25)Ga_(0.25)In_(0.5)Pspacer layer adjacent to the active layer, and a multilayer filmreflector including 34 pairs of layers, each pair including a p-typeAlAs layer about 50 nm in thickness and a p-type Al_(0.5)Ga_(0.5)Aslayer about 50 nm in thickness.

In this case, the thickness of the p-type layer, which is the totalthickness of the p-type AlInP spacer layer and the p-type DBR layer, is3 μm or more.

As described above, in the cases where the p-type DBR region having aconduction band edge higher than that of the p-type spacer layer issufficiently thick, the possibility that the electrons injected from then-type semiconductor layer to the active layer will overflow to thep-type spacer layer adjacent to the active layer so as to cause leakagecurrent can be dramatically small.

This means that, in the spacer layer, the concentration gradient ofelectrons that overflowed from active layers is more gradual than in thecase where no p-type DBR region is provided.

The magnitude of the diffusion current related to leakage is dependenton the electron concentration gradient. Thus, the band diagram shown inFIG. 6 shows that the amount of diffusion current component of theleakage current generated by the electrons crossing over the spacerlayer should be significantly small.

However, as described above, a red surface emitting laser element haspoor temperature characteristics.

In a red surface emitting laser element, the resonator region interposedbetween the upper and lower multilayer film reflectors is usuallycomposed of AlGaInP, while the multilayer film reflectors are usuallycomposed of AlGaAs. In other words, the resonator region is composed ofa material different from that of the multilayer film reflector regions.

In the red surface emitting laser element, both a p-type semiconductorspace layer (e.g., a p-type AlGaInP spacer layer) and a p-type DBRregion (e.g., an AlGaAs layer) are provided as the p-type layer. Thisunique structure is not found in infrared surface emitting lasers inwhich all layers are composed of AlGaAs-based materials.

In other words, in order to analyze the influence on the leakage currentin a device including a multilayer structure composed of differentmaterials of the same conductivity type, it is necessary to analyze indetail the location of the conduction band edge, which is the potentialthat affects electrons.

Thus, the potential of electrons is investigated by simultaneouslytaking into account the following two factors with respect to the p-typespacer layer and the constituent layers of the p-type DBR region of thered surface emitting laser element:

(1) Since these p-type layers are doped with a p-type impurity, theFermi level of each layer is substantially located at the band edge ofthe valence band; and(2) Al_(x)Ga_(1-x)In_(0.5)P (0.25≦x≦0.55, in particular, the region0.35≦x≦0.5) used as the p-type semiconductor spacer layer andAl_(y)Ga_(1-y)As (0.4≦y≦1) constituting the DBR region are not directtransition semiconductors but are indirect transition semiconductors,and the band edge in the conduction band is not the Γ point but the Xpoint. It should be noted here that the Γ point is a region where thebottom of the conduction band edge is considered to lie in directtransition semiconductors.

On the basis of points (1) and (2), the electron potential, i.e., theband edge lineup of the X points in the conduction band, appears as asolid line 1010 shown in FIG. 1. In FIG. 1, the horizontal axisindicates the thickness of the element, and the vertical axis indicatesthe band offset with respect to GaAs. The positive-side region is theconduction band side, and the negative-side region is the valence bandside.

In FIG. 1, 1050 indicates the p-type semiconductor spacer layer, and1060 indicates one pair of layers in the p-type DBR region (a pluralityof pairs are provided in the actual element). In FIG. 1, the bandstructure when the p-type semiconductor spacer layer 1050 is composed ofp-type Al_(0.35)Ga_(0.15)In_(0.5)P and the p-type DBR region 1060includes a p-type Al_(0.9)Ga_(0.1)As layer and a p-typeAl_(0.5)Ga_(0.5)As layer as a pair is illustrated.

For comparative purposes, a band edge 1020 of the conduction band at theΓ point, a lineup 1090 of the band edge of the valence band, and quasiFermi levels 1092 and 1093 are included in the graph. For the sake ofsimplicity, spikes, notches, and the like caused by discontinuation ofthe band edge energy are not shown in FIG. 1. Since the p-type layersare investigated, the band lineups of the layers doped with a p-typeimpurity are determined so that the Fermi levels near the valence bandare the same.

In Al_(0.9)Ga_(0.1)As constituting the p-type DBR region 1060 (p-typesemiconductor multilayer film region), the band edge at the X point(1010 in FIG. 1) is significantly lower than that at the Γ point (1020in FIG. 1). In particular, the band edge potential of the conductionband of the p-type Al_(0.9)Ga_(0.1)As adjacent to the p-type AlGaInPspacer layer drops by as much as about 200 meV.

In other words, one can establish a band diagram different from the banddiagram (FIG. 6) disclosed in Schneider reference.

On the basis of the newly established band diagram described above, theleakage current can again studied as below.

Electrons cross the hetero gap, i.e., the difference between the bandedges of the active layer 1070 and the p-type semiconductor spacer layer1050, and are present in the p-type semiconductor spacer layer 1050. Theconcentration of such electrons is actually affected by the potentialdrop at the conduction band edge of Al_(0.9)Ga_(0.1)As, which is theconstituent of the adjacent p-type DBR region 1060. An undoped barrierlayer 1075 in FIG. 1 is provided as necessary.

Thus, it is considered that nearly all electrons near the interfacebetween the p-type semiconductor spacer layer 1050 and a p-typeAl_(0.9)Ga_(0.1)As 1061 fall to the p-type Al_(0.9)Ga_(0.1)As side andthat electrons having the same energy as that inside the p-typesemiconductor spacer layer are scarce near the interface.

In other words, the electron concentration gradient in the p-typesemiconductor spacer layer 1050 is extremely large and the diffusioncurrent component can take a very large value.

Thus, the p-type DBR region 1060 does not actually function as a barrieragainst the carrier electrons that leak over the p-type semiconductorspacer layer 1050.

In other words, the effective thickness of the p-type layer contributingto suppression of the leakage current crossing the p-type semiconductorspacer layer is not the total thickness of the spacer layer and thep-type DBR region, but is the thickness of the p-type semiconductorspacer layer only.

In order to study the leakage current on the basis of this new finding,the leakage current was calculated with the formula below (formula 1).

The leakage current density (J_(leak)) is given by the following formulaon the basis of the diffusion component and drift component of electronsleaking from the active layer to the p-type semiconductor spacer layer(see D. Dour et al., Journal of Quantum Electronics, Vol. 29, No. 5(1993) 1337):

$\begin{matrix}{{J_{leak} = {{{qD}_{n} \cdot 2}{\left( \frac{2\; \pi \; m_{n}{kT}}{h^{2}} \right)^{3/2}\left\lbrack {\exp \left( {{- \Delta}\; {E/{kT}}} \right)} \right\rbrack}\left( {{\sqrt{\frac{1}{L_{n}^{2}} + \frac{1}{4\; Z^{2}}}\coth \sqrt{\frac{1}{L_{n}^{2}} + \frac{1}{4\; Z^{2}}}x_{p}} + \frac{1}{2\; Z}} \right)}}{z = {\frac{kT}{q} \cdot \frac{\sigma_{p}}{J_{total}}}}} & (1)\end{matrix}$

where q is the amount of charges, D_(n) is the diffusion constant of theelectron, m_(n) is the effective mass of the electron, k is theBoltzmann constant, h is the Planck's constant, T is the temperature, ΔEis the hetero barrier, L_(n) is the diffusion length of the electron, Zis the effective field length, σ_(p) is the conductivity of the p-typespacer layer, J_(total) is the total injection current density, andx_(p) is the thickness of the p-type cladding layer.

FIG. 2A shows the normalized leakage current (solid line 2091)calculated with formula (1) above. The horizontal axis indicates thethickness of the p-type semiconductor spacer layer and the vertical axisindicates the normalized leakage current. It is assumed that the spacerlayer is composed of AlGaInP (e.g., Al_(0.5)In_(0.5)P orAl_(0.35)Ga_(0.25)In_(0.5)P).

The graph clearly shows that the leakage current (in particular, thediffusion current component) dramatically increases in the region wherethe thickness of the p-type semiconductor spacer layer is about 80 nm orless. It can be assumed that, in this region, the luminous efficiency islow, high-temperature performance characteristics are poor, and fullpower operation is difficult.

The thickness of the p-type semiconductor spacer layer disclosed inCrawford reference is “50 nm”. The above-described findings show that,with this thickness, the resulting structure is not advantageous forsuppressing leakage current.

In other words, while the thickness of the p-type AlGaInP spacer layertypically used in red surface emitting lasers is about 50 nm, ourfinding indicates that the thickness of the p-type spacer layer must beincreased to achieve enhanced high-temperature performancecharacteristics.

First Embodiment Red Surface Emitting Laser Element

A red surface emitting laser element including a multilayer filmaccording to a first embodiment will now be described with reference toFIG. 3.

A laser element 3000 includes a first reflector 302, a second reflector308 including a p-type semiconductor multilayer film, and an activelayer 305 interposed between the first reflector 302 and the secondreflector 308. The laser element 3000 also includes a p-typesemiconductor spacer layer 307 having a thickness of 100 nm or more and350 nm or less between the active layer 305 and the second reflector308.

The reason for making the thickness of the p-type semiconductor spacerlayer to 100 nm or more and 350 nm or less will now be described. Notethat “thickness” means the length in the stacking direction.

A dotted line 2095 in FIG. 2A is drawn to find the degree of change(inclination) in normalized leakage current with respect to thethickness of the p-type semiconductor spacer layer in the region wherethe normalized leakage current increases significantly.

The graph shows that the thickness of the p-type semiconductor spacerlayer 307 should be outside a region 2591 where the inclination isparticularly large and should be 100 nm or more since there may beslight variations depending on the compositional ratio of the materialconstituting the spacer layer.

In contrast, a dotted line 2096 is drawn to find the degree of change(inclination) in normalized leakage current with respect to thethickness of the p-type semiconductor spacer layer 307 in a region 2592where the normalized leakage current undergoes a very moderate change.The dotted line 2096 clearly shows that changes in thickness of thespacer layer do not substantially affect the leakage current in theregion where the thickness of the p-type spacer layer exceeds 350 nm.

Referring now to FIG. 2B, a solid line 2091 shows a change in lossinside the resonator plotted versus the thickness of the p-type spacerlayer. In the graph, the mirror loss caused by the reflectors is notconsidered, and only the loss caused by absorption of the free carriersin the p-type spacer layer and the p-type DBR layer is considered anddistributed over the entire cavity length. FIG. 2B clearly shows thatthe loss inside the resonator increases with the thickness of the p-typespacer layer. In this respect, the thickness of the spacer layer may beas small as possible. The graph shows that even when the thickness ofthe p-type semiconductor spacer layer is 350 nm, the increase in lossinside the resonator is 20% or less (calculated by assuming the lossinside the resonator to be 12.5 cm⁻¹ at 350 nm and 10.5 cm⁻¹ at 50 nm).

Thus, the thickness of the p-type semiconductor spacer layer may be 100nm or more and 350 nm or less.

In the description above relating to the p-type semiconductor spacerlayer, the description of the specific compositional ratio is omitted.

It should be noted that in FIG. 2A, the normalized leakage current iscalculated on the basis of the following portion in formula (1) whileassuming the remainder to be the same:

$J_{leak} \propto \left( {{\sqrt{\frac{1}{L_{n}^{2}} + \frac{1}{4\; Z^{2}}}\coth \sqrt{\frac{1}{L_{n}^{2}} + \frac{1}{4\; Z^{2}}}x_{p}} + \frac{1}{2\; Z}} \right)$$z = {\frac{kT}{q} \cdot \frac{\sigma_{p}}{J_{total}}}$

In the calculation, the thickness of the p-type layer is assumed to bethe thickness of the p-type AlGaInP spacer layer (x_(p)=40 to 700 nm).Moreover, the doping level of the p-type impurity is assumed to be1×10¹⁸ cm⁻³, the diffusion length of the electron is assumed to be 1 μm,and the total injection current density J_(total) is assumed to be 3kA/cm². In order to normalize the leakage current with respect to thespacer layer, the value of the temperature T is not considered in thecalculation. Regarding the inner light absorption, the free carrierabsorption of the entire element including the multilayer film reflector(p-type DBR region) is calculated.

The p-type semiconductor spacer layer and the p-type semiconductormultilayer film (p-type DBR region) will now be described in detail.

The materials are selected such that the conduction band edge at the Xpoint of the p-type semiconductor spacer layer 307 is higher than thatof one of the two layers constituting a repeating unit of the p-type DBRregion (1060 in FIG. 1 and 308 in FIG. 3) that has a higher conductionband edge at the X point. In other words, the materials are selectedsuch that the conduction band edge at the X point in the p-type DBRregion is lower than the conduction band edge of the p-typesemiconductor spacer layer.

The p-type semiconductor spacer layer 307 may be constituted from alayer containing aluminum, indium, and phosphorus.

When the composition of the p-type semiconductor spacer layer 307 isAl_(x)Ga_(y)In_(1-x-y)P, the ranges of x and y may be as follows.

First, in order to achieve lattice matching between theAl_(x)Ga_(y)In_(1-x-y)P and GaAs, the ratio of indium (“1−x−y” in thecompositional formula) may be 0.45 to 0.55, specifically, 0.48 to 0.50.

In other words, 0.45≦x+y≦0.55, specifically, 0.50≦x+y≦0.52.

Typically, the barrier layer inside the active layer is composed ofAl_(0.2)Ga_(0.3)In_(0.5)P. To obtain a hetero barrier between the activelayer and the p-type semiconductor spacer, the ratio of aluminum (x) maybe 0.25 or more, 0.30 or more, or 0.35 or more. The upper limit of theratio of aluminum in the composition is 0.55 or less and may be 0.52 orless to achieve lattice matching.

The ratio of gallium may be zero. Therefore, one example of thecomposition of the p-type semiconductor spacer layer isAl_(x)Ga_(y)In_(1-x-y)P (where x and y satisfy the aforementionedrelationships, 0.45≦x+y≦0.55, 0.25≦x≦0.55, and 0≦y≦0.30).

Alternatively, the composition of the p-type semiconductor spacer layermay be Al_(x)Ga_(y)In_(1-x-y)P (where 0.50≦x+y≦0.52, 0.35≦x≦0.52,0≦y≦0.17).

It should be noted here that the composition may contain otherimpurities and the like as long as the material can be depositedepitaxially.

When the ratio of indium is 0.5, i.e., when a p-typeAl_(z)Ga_(1-z)In_(0.5)P spacer layer is employed, z can be adequatelydetermined in the range of 0.35≦z≦0.5, for example. When z is in thisrange, a spacer layer having a relatively high degree of crystallinitycan be easily formed, and the band offset between the active layer andthe spacer layer can be increased.

The p-type semiconductor spacer layer 307 may employ a multi quantumbarrier (MQB) structure.

Of the two layers constituting the repeating unit of the secondreflector 308, one having a higher conduction band edge (when bothlayers are composed of AlGaAs, the one having a larger aluminum ratio)may have a composition, Al_(x)Ga_(1-x)As (0.70≦x≦1.0, in particular,0.8≦x≦1.0).

The p-type semiconductor multilayer film constituting the secondreflector 308 includes a plurality of stacked repeating units eachincluding a first layer and a second layer having different refractiveindices. At least one of the first and second layers may containaluminum, gallium, and arsenic, as described above.

Of the two layers constituting the repeating unit, the composition ofthe layer having a lower conduction band edge may be Al_(x)Ga_(1-x)As(0.40≦x≦0.70, in particular, 0.45≦x≦0.60). In the composition, x is setto 0.4 or more so that the wavelength of the light emitted from theactive layer is not absorbed and that a sufficient reflective index canbe achieved with respect to other layers constituting the DBR, althoughthis may depend upon the emission wavelength from the active layer. Forexample, when the composition of the layer is Al_(x)Ga_(1-x)As, x=0.5.

In FIG. 1, of the layers constituting the second reflector 308 (p-typesemiconductor multilayer film), one having a higher conduction band edgeat the X point is illustrated to be adjacent to the p-type semiconductorspacer layer 1050. However, this arrangement is not essential. Forexample, of the layers constituting the DBR region, one having a lowerconduction band edge at the X point may be adjacent to the p-typesemiconductor spacer layer 1050.

(a) Structure of Resonator

In order to obtain a p-type semiconductor spacer layer having the abovementioned thickness, a cavity length larger than 1 wavelength isdesirable. For example, a cavity length of 1.5 wavelength or more may beemployed.

The p-type semiconductor spacer layer (1050 in FIG. 1 and 307 in FIG. 3)may be a p-type AlGaInP spacer layer having a thickness of 100 nm ormore and 350 nm or less, in particular, 150 nm or more and 300 nm orless.

Examples of the cavity length is 1.5 wavelength and 2 wavelength. Inorder to obtain such a cavity length, the thickness of the p-typesemiconductor spacer layer may be increased so that the cavity lengthincreases by a 0.5 wavelength increment. Since 0.5 wavelengthcorresponds to about 100 nm, the thickness is 160 nm (in the cases where0.5 wavelength is added) and 260 nm (in the cases where 1 wavelength isadded) when combined with an ordinary p-type AlGaInP layer having athickness of about 60 nm. Thus, the thickness of the p-typesemiconductor spacer layer can be 150 nm or more and 300 nm or less inparticular so as to include the cases where 0.5 wavelength is added andwhere 1 wavelength is added.

With respect to the resonator structure of this embodiment, the cavitylength can be 1.5 wavelength or more, and the upper limit of the cavitylength is 4 wavelength or less, preferably 3.5 wavelength or less, andmore preferably 2.5 wavelength or less. “Cavity length” is the thicknessof the region between the first and second reflectors in the stackingdirection.

Referring now to FIG. 3, an n-type semiconductor spacer layer 303located at a substrate 301 side of the active layer 305 is not essentialin terms of carrier overflow and may be provided according to need.

Since the leakage current of the holes into the n-type semiconductorspacer layer 303 (e.g., AlGaInP) is sufficiently small, the thickness ofthe n-type semiconductor spacer layer 303 may be about 40 nm to 80 nm.

In other words, the resonator of the present invention includes theactive layer 305, the p-type semiconductor spacer layer 307, and then-type semiconductor spacer layer 303. The resonator may have anasymmetrical structure in which the active layer 305 is not located atthe center in the cavity length direction.

In particular, the thickness of the p-type semiconductor spacer layer307 can be larger than the thickness of the n-type semiconductor spacerlayer 303. Note that the “asymmetrical structure” means a structure inwhich the p-type semiconductor spacer layer 307 is thicker than then-type semiconductor spacer layer 303 and the active layer 305 is notdisposed at the center of the resonator. The element structure may bedesigned such that the center of the active layer aligns with ananti-node of the standing wave of the light intensity inside the element(also referred to as “inner light intensity standing wave” hereinafter).

Referring to FIG. 3, layers 304 and 306 adjacent to the active layer 305are undoped spacer layers (spacer layers having a lower impurityconcentration lower than the p-type and n-type semiconductor spacerlayers 307 and 303) that may be provided if necessary. The layers 304and 306 are not essential in this embodiment, but can be formed asbarrier layers for blocking diffusion of impurities from the p-typesemiconductor spacer layer 307 and n-type semiconductor spacer layer 303into the active layer 305. The thickness of the layers 304 and 306 canbe 10 nm or more and 50 nm or less, in particular, 20 nm or more and 40nm or less.

In an AlGaInP-based semiconductor laser, a GaInP quantum well structuremay be employed in the active layer to achieve emission of red light.Examples of the p-type semiconductor spacer layer 307 include anAl_(0.35)Ga_(0.15)In_(0.5)P layer and an Al_(0.5)In_(0.5)P layer.

The structures of the layers of the red surface emitting laser of thisembodiment will now be described with specific materials.

For example, an Al_(x)Ga_(0.5-x)In_(0.5)P layer (0.2≦x≦0.5) having athickness of about 170 nm may be used as the p-type semiconductor spacerlayer 307. Since holes having a large effective mass rarely cross then-type semiconductor spacer layer 303 composed ofAl_(x)Ga_(0.5-x)In_(0.5)P (0.2≦x≦0.5) and contribute to the leakagecurrent, the thickness of the n-type AlGaInP layer may be as usual,e.g., about 50 nm.

The active layer 305 is designed to have a multi quantum well structurefavored in surface emitting lasers and the thickness thereof is about 40nm to about 50 nm. Thus, the cavity length of the resonator as a wholeshould be designed to be at least 1.5 wavelength.

Since the active layer 305 aligns with the anti-node of the inner lightintensity standing wave, the active layer 305 is not located at thecenter of the 1.5 wavelength cavity length. Thus, the structure of theresonator has an asymmetrical structure instead of a symmetricalstructure common to usual 1 wavelength resonators.

In some cases, the symmetrical structure is advantageous in that theposition of the active layer can be easily aligned with the anti node ofthe inner light intensity standing wave while adjusting the resonantwavelength to a desired value during crystal growth. Thus, the thicknessof the n-type AlGaInP spacer layer is increased to be the same as thethickness of the p-type AlGaInP layer. For example, the thickness of then-type AlGaInP spacer layer may be adjusted to about 170 nm so that aresonator having a symmetrical structure can be formed. In such a case,according to the examples described above, the cavity length is 2wavelength. Since absorption of free carriers in the n-type spacer layeris smaller than in the p-type layer, the problem of optical absorptionby the thick n-type layer is not as serious as in the p-type layer.

As a result, a novel red surface emitting laser element in which theleakage current is reduced and the optical absorption does notsignificantly increase by the increase in thickness of the spacer layercan be provided.

b) Other Structures

In FIG. 3, the substrate 301 (e.g., a GaAs substrate) is illustrated butmay be omitted according to need. For example, the substrate composed ofGaAs and other suitable material may be used to deposit a multilayerfilm thereon and then removed. Alternatively, the multilayer film may betransferred to another substrate such as a silicon substrate, asilicon-on-insulator (SOI) substrate a germanium substrate, a plasticsubstrate, or a transparent substrate such as a glass substrate. Inorder to enhance heat dissipation, the light emitting element may betransferred on a silicon substrate or a SOI substrate. In transferringthe film, a polishing technique or a grinding technique may be used toremove the deposition substrate. Alternatively, a sacrificial layer maybe formed on the deposition substrate and then the layers constitutingthe element may be formed on the sacrificial layer to facilitate thetransfer of the film.

The second reflector 308 (p-type semiconductor multilayer film) cancontain aluminum and arsenic. The second reflector 308 includes aplurality of units each including a first layer and a second layerhaving different refractive indices. At least one of the first andsecond layers may be a layer containing aluminum, gallium, and arsenic.

The material of the second reflector 308 is not limited to AlAs andAlGaAs and may be any semiconductor material having a lattice thatmatches with the lattice of GaAs.

The first reflector 302 may be an n-type semiconductor multilayer film.An n-type AlGaInP spacer layer (303 in FIG. 3) may be provided betweenthe first reflector 302 and the active layer 305.

The first reflector 302 does not need to be an n-type DBR as long aselectrical current can be injected into the laser element 3000. If abonding technique is employable, a photonic crystal may be used as thereflector instead of the semiconductor multilayer film.

In FIG. 3, spacer layers 304 and 306 are provided between the activelayer 305 and the p-type and n-type spacer layers 303 and 307 but may beomitted according to need. In FIG. 3, the first reflector 302 (n-typeDBR region) is provided at the substrate 301 side and the secondreflector 308 (p-type DBR region) is provided above the active layer.However, this arrangement may be reversed. For example, the p-type DBRregion or the p-type spacer layer may be disposed between the activelayer and the substrate.

An example of the structure of the active layer 305 is a quantum wellactive layer including a GaInP layer and an AlGaInP layer. In thisembodiment, the structure may be any structure that can output red light(light having a wavelength of 0.6 μm to 0.73 μm, in particular, 0.63 μmto 0.72 μm). For example, an active layer having a double heterostructure or a quantum dot structure may be employed, and AlGaInPN andother suitable materials may be used as the active layer. Alternatively,as described below with reference to FIGS. 8 and 10, a plurality ofactive layers may be used. For example, as shown in FIG. 8, two or moreactive layers may be used.

As described above, the resonator includes the active layer 305, thep-type semiconductor spacer layer 307, and the n-type semiconductorspacer layer 303 and can take an asymmetrical structure in which theactive layer is not disposed at the center in the cavity lengthdirection.

The thickness of the p-type AlGaInP semiconductor spacer layer 307 canbe larger than the thickness of the n-type AlGaInP semiconductor spacerlayer 303.

In this embodiment, the thicknesses of the layers in the DBR region maybe designed to form a vertical cavity surface emitting laser; however,the emission does not have to be exactly vertical as long as surfaceemission is possible.

This embodiment is suitable for laser elements required to achieve alaser operation at high temperature. In particular, the embodiment iseffective when applied to single transverse mode laser elementsexhibiting high light output power.

Second Embodiment

A red surface emitting laser element including a multilayer filmaccording to a second embodiment of the present invention will now bedescribed with reference to FIG. 3 as with the first embodiment.

The element includes the first reflector 302, the second reflector 308including a p-type AlGaAs semiconductor multilayer film, and the activelayer 305 interposed between the first reflector 302 and the secondreflector 308. The element also includes a p-type AlInP or AlGaInPsemiconductor spacer layer 307 having a thickness of 100 nm or more and350 nm or less between the active layer 305 and the second reflector308.

The p-type semiconductor spacer layer can contain both AlInP and AlGaInPif the thickness of the p-type semiconductor spacer layer as a whole iswithin the above-described range.

This structure provides a novel red surface emitting laser element inwhich the leakage current is reduced.

Note that the notations “AlGaAs” and “AlGaInP” indicate that the formerlayer contains aluminum, gallium, and arsenic, and the latter layercontains aluminum, gallium, indium, and phosphorus. The compositionalratios are not particularly limited as long as the layers can be grownepitaxially and emission of red light is achieved. The descriptions inthe first embodiment can be applied to the laser element of the secondembodiment as long as there is no inconsistency.

Third Embodiment

A red surface emitting laser element including a multilayer filmaccording to a third embodiment will now be described with reference toFIG. 3 as in the above-described embodiments.

The element includes the first reflector 302, the second reflector 308including a p-type semiconductor multilayer film, the active layer 305interposed between the first reflector 302 and the second reflector 308,and the p-type semiconductor spacer layer 307 between the active layer305 and the second reflector 308.

As described with reference to FIG. 1, the conduction band edge at thepoint X of the p-type semiconductor multilayer film is lower than thatof the p-type semiconductor spacer layer 307, and the thickness of thep-type semiconductor spacer layer 307 in the stacking direction is 100nm or more and 350 nm or less.

Although the leakage current cannot be sufficiently decreased due to thepresence of the second reflector 308 including the p-type semiconductormultilayer film, the leakage current can be reduced by adjusting thethickness of the p-type semiconductor spacer layer 307 to 100 nm or moreand 350 nm or less (see FIG. 2A).

The descriptions in the first embodiment can be applied to the laserelement of the third embodiment as long as there is no inconsistency.

Fourth Embodiment Image Forming Device and Image Display Apparatus

The red surface emitting laser elements described in the first to thirdembodiments may be applied to an image forming device or an imagedisplay apparatus, for example.

When the element is applied to an image forming device, as shown inFIGS. 9A and 9B, the image forming device includes a red surfaceemitting laser element 914 and a light deflector 910 for reflecting thelaser beam output from the laser element so as to conduct scanning. Thelight deflector 910 may have any structure that can reflect the laserbeam and scan the direction of reflection.

Examples of the light deflector 910 include a multi-faceted mirror, apolygonal mirror, and a reflector formed by vibrating a laminatecomposed of silicon or the like by using a micro electro mechanicalsystem (MEMS).

If the device is an electrophotographic device, a drum-shapedphotosensitive member 900, a charger 902, a developer 904, and a fixer908 for forming an electrostatic latent image by the beam deflected bythe light deflector 910 are provided. The details of theelectrophotographic device will be described through examples below.

The red surface emitting laser element can be used in combination withthe deflector and other associated components so as to form an imagedisplay apparatus such as a display.

Alternatively, many red surface emitting laser elements may be arrangedinto an array so that a multi beam image forming device can be formed.

EXAMPLES Example 1

Example 1 will now be described. FIG. 3 is a schematic cross-sectionalview of a layer structure of a red surface emitting laser element of theexample 1.

The vertical cavity surface emitting laser (VCSEL) of the example 1includes an n-type GaAs substrate 301, an n-typeAl_(0.9)Ga_(0.1)As/Al_(0.5)Ga_(0.5)As multilayer film reflector 302, ann-type Al_(0.35)Ga_(0.15)In_(0.5)P spacer layer 303, an undopedAl_(0.25)Ga_(0.25)In_(0.5)P barrier layer 304, aGa_(0.56)In_(0.44)P/Al_(0.25)Ga_(0.25)In_(0.5)P quantum well activelayer 305, an undoped Al_(0.25)Ga_(0.25)In_(0.5)P barrier layer 306, ap-type Al_(0.5)In_(0.5)P spacer layer 307, a p-typeAl_(0.9)Ga_(0.1)As/Al_(0.5)Ga_(0.5)As multilayer film reflector 308, anda p-type GaAs contact layer 309. A red surface emitting laser elementemitting light having a wavelength of 680 nm is formed thereby.

First, the n-type Al_(0.9)Ga_(0.1)As/Al_(0.5)Ga_(0.5)As multilayer filmreflector 302 and the p-type Al_(0.9)Ga_(0.1)As/Al_(0.5)Ga_(0.5)Asmultilayer film reflector 308 are described. Each of theAl_(0.9)Ga_(0.1)As layer and the Al_(0.5)Ga_(0.5)As layer is formed tohave an optical thickness of a quarter wave.

In an actual element, a composition gradient layer about 20 nm inthickness is provided between the Al_(0.9)Ga_(0.1)As layer and theAl_(0.5)Ga_(0.5)As layer to decrease the electrical resistance.

In such cases, the total thickness including the thickness of thecomposition gradient layer is designed to be the optical thickness of aquarter wave. In order to allow the current to flow, the p-typemultilayer film reflector 308 is doped with an impurity acting as anacceptor, such as carbon or zinc. The n-type multilayer film reflector302 is doped with an impurity acting as a donor, such as silicon orselenium. In order to reduce absorption of light inside the multilayerfilm reflector as much as possible, a modulated doping may be conductedso that the doping level is low at the anti-node and high at the node ofthe light intensity standing wave inside the multilayer film reflector.

In this example, the light is output from the epitaxial layer surface,i.e., the p-type layer side. Thus, the p-type multilayer film reflector308 is designed to include about thirty six repeating pairs to form areflector exhibiting the optimum light output efficiency. Since light isnot output from the n-type layer side, the n-type multilayer filmreflector 302 is designed to include about sixty repeating pairs toincrease the reflectivity as much as possible to decrease the thresholdcurrent.

In the p-type multilayer film reflector 308, an Al_(0.98)Ga_(0.02)Aslayer having a thickness of about 30 nm may be inserted at a position 1to 3 pairs from the active layer, and the Al_(0.98)Ga_(0.02)As layer maybe selectively oxidized to form a current-confining structure.

The process of making the resonator will now be described.

Since the thickness of the p-type Al_(0.5)In_(0.5)P spacer layer 307 isset to 100 nm or more and 350 nm or less, the cavity length is 1.5wavelength as shown in FIG. 4 instead of 1 wavelength usually employed.

Since the emission wavelength is 680 nm, 1.5 wavelength gives an opticalthickness of 1020 nm. The layers constituting the resonator are allcomposed of AlGaInP. However, AlGaInP materials with differentcompositional ratios are used for the active layer, barrier layer,spacer layer, and other layers. Thus, the thickness of each layer shouldbe determined on the basis of the refractive index so that the cavitylength is 1.5 wavelength.

In order to maximize the interaction between light and carriers, theactive layer must be disposed at an anti-node 403 of the standing wave.In other words, the active layer 305 is disposed at a position one thirdof 1020 nm from one end, and the n-type layer is disposed in a smallerregion (the left-hand side of the active layer 305 in FIG. 4) and thep-type layer is disposed in a larger region (the right-hand side of theactive layer 305 in FIG. 4).

The actual examples will be described in detail below while consideringthe above-described conditions.

The active layer 305 includes four 6 nm GaInP quantum wells and three 6nm Al_(0.25)Ga_(0.25)In_(0.5)P barrier layers. The actual thickness ofthe active layer 305 is 42 nm.

Since the refractive indices of the GaInP layer and theAl_(0.25)Ga_(0.25)In_(0.5)P layer at an emission wavelength of 680 nmare 3.56 and 3.37, respectively, the optical thickness of the activelayer is 146 nm.

It is necessary that the sum of one half of the optical thickness of theactive layer region (73 nm), the optical thickness of the undopedAl_(0.25)Ga_(0.25)In_(0.5)P barrier layer 304, and the optical thicknessof the n-type Al_(0.35)Ga_(0.15)In_(0.5)P spacer layer 303 be 340 nm,i.e., one third of 1020 nm.

Thus, the undoped Al_(0.25)Ga_(0.25)In_(0.5)P barrier layer 304 isformed to have a thickness of 20 nm, and the n-typeAl_(0.35)Ga_(0.15)In_(0.5)P spacer layer 303 is formed to have athickness of 60.5 nm. Since the refractive indices of the layers 304 and303 are 3.37 and 3.30, respectively, the total optical thickness ofthese two layers is 267 nm.

In other words, the total of 73 nm, which is one half of the opticalthickness of the active layer 305, and 267 nm is 340 nm, and as shown inFIG. 4, the center of the active layer 305 aligns with the anti node 403of the standing wave.

With respect to the p-type layer side, it is necessary that the sum ofone half of the optical thickness of the active layer 305 (73 nm) andthe optical thicknesses of the undoped Al_(0.25)Ga_(0.25)In_(0.5)Pbarrier layer 306 and the p-type Al_(0.5)In_(0.5)P spacer layer 307 bethe remainder, i.e., 680 nm.

Although the Al_(0.35)Ga_(0.15)In_(0.5)P layer is used at the n-typelayer side, Al_(0.5)In_(0.5)P layers are used at the p-type layer sideto increase the hetero barrier as much as possible, and doping isconducted up to about 1×10¹⁸ cm⁻³. Zinc or magnesium may be used as adopant.

The barrier layer 306 is formed to have a thickness of 20 nm, and thep-type Al_(0.5)In_(0.5) spacer layer 307 is formed to have a thicknessof 167.6 nm. Since the refractive indices of the layers 306 and 307 are3.37 and 3.22, respectively, the total optical thickness of these twolayers is 607 nm. The sum of 607 nm and one half of the opticalthickness of the active layer 305, i.e., 73 nm, is 680 nm.

As is described above, the optical thicknesses of the n-type layerincluding the undoped barrier layer, the active layer, and the p-typelayer including the undoped barrier layer are 267 nm, 146 nm, and 607 nm(total: 1020 nm), respectively. The total corresponds to the opticalthicknesses for a 1.5 wavelength resonator.

The thickness of the p-type layer is 167.6 nm, which is in the range of100 nm or more and 350 nm or less.

Multilayer film reflectors are formed at the both sides of theresonator. Both n-side and p-side multilayer film reflectors arearranged so that the interfaces between the resonator and the multilayerfilm reflectors align with the anti nodes of the standing wave.

To be more specific, a low refractive index material, i.e., anAl_(0.9)Ga_(0.1)As layer 402, is in contact with the resonator, and ahigh refractive index material, i.e., an Al_(0.5)Ga_(0.5)As layer 401,is disposed adjacent to the Al_(0.9)Ga_(0.1)As layer 402. A requirednumber of pairs of the layers 401 and 402 is repeatedly provided (36pairs at the p-side and 60 pairs at the n-side).

In actual device fabrication, a wafer having layers with thicknessesdescribed above is formed by a crystal growth technique.

For example, layers are formed by an organometallic chemical vapordeposition system or a molecular beam epitaxy system. After the wafer isformed, a laser element 5000 shown in FIG. 5 is formed by a regularsemiconductor process. Note that in FIG. 5, the layers having the samefunctions as the layers described with reference to FIG. 3 arerepresented by the same reference numerals.

A post is formed by photolithography and semiconductor etching, and acurrent confining layer 502 is formed by selective oxidation.Subsequently, an insulating film 503 is formed and is partly removed toexpose a portion of the p-type GaAs contact layer 309 for contact, and ap-side electrode 504 is formed. Finally, an n-side electrode 501 isformed on the rear surface of the wafer to conclude fabrication of theelement.

The element fabricated as above can achieve high-temperature operationand full-power operation and extend the range of application of the redsurface emitting laser elements.

The description above provides a process of making one element.

In making a plurality of elements integrated into an array, for example,in aligning thirty two elements into a 4 by 8 array at a pitch of 50 μm,a photomask having the target element arrangement is used from theinitial stage. A plurality of elements arranged into an array can thenbe simultaneously formed by using the same epiwafer as above by the sameprocess for making the element. In other words, a red surface emittinglaser array can be easily obtained by using a mask with a targetpattern.

Note that the element described above is formed by using an n-type GaAssubstrate and the p-type layer is disposed in the upper part.Alternatively, a p-type GaAs substrate may be used in forming theelement so that the element includes the n-type layer in the upper part.

Example 2

Example 2 will now be described. FIG. 7 is a schematic cross-sectionalview of a layer structure of a red surface emitting laser element 7000of Example 2.

The VCSEL structure of this example includes an n-type GaAs substrate301, an n-type AlAs/Al_(0.5)Ga_(0.5)As multilayer film reflector 701, ann-type Al_(0.35)Ga_(0.15)In_(0.5)P spacer layer 303, an undopedAl_(0.25)Ga_(0.25)In_(0.5)P barrier layer 304, a firstGa_(0.56)In_(0.44)P/Al_(0.25)Ga_(0.25)In_(0.5)P quantum well activelayer 702, an Al_(0.25)Ga_(0.25)In_(0.5)P intermediate barrier layer703, a second Ga_(0.56)In_(0.44)P/Al_(0.25)Ga_(0.25)In_(0.5)P quantumwell active layer 704, an undoped Al_(0.25)Ga_(0.25)In_(0.5)P barrierlayer 306, a p-type Al_(0.35)Ga_(0.15)In_(0.5)P spacer layer 705, ap-type Al_(0.9)Ga_(0.1)As/Al_(0.5)Ga_(0.5)As multilayer film reflector308, and a p-type GaAs contact layer 309. A red surface emitting laseremitting light having a wavelength of 680 nm is made thereby.

The n-type multilayer film reflector 701 is composed of AlAs instead ofAl_(0.9)Ga_(0.1)As. This is because AlAs has a small thermal resistanceand can decrease the thermal resistance of the element as a whole.

The p-type Al_(0.9)Ga_(0.1)As/Al_(0.5)Ga_(0.5)As multilayer filmreflector 308 is the same as that of the example 1 (FIG. 3).

As shown in FIG. 7, in this example, a periodic gain structure includingtwo multi quantum well structures is employed. This structure increasesthe optical confinement ratio and mode gain, and high emission outputcan be easily obtained.

In addition to employing the periodic gain structure described above,the cavity length is set to 2.5 wavelength to make the thickness of thep-type AlGaInP layer in the range of 100 nm or more and 350 nm or less,as shown in FIG. 8.

The layer structure of the resonator will now be described withreference to FIG. 8.

Since the resonant wavelength is 680 nm and the cavity length is 2.5wavelength, the optical thickness is 1700 nm.

Layers in the resonator are all composed of AlGaInP. However, sinceAlGaInP materials with different compositional ratios are used for theactive layer, barrier layer, spacer layer, and other layers, thethickness of each layer should be determined on the basis of therefractive index so that the cavity length is 2.5 wavelength.

Moreover, in order to maximize the interaction between light andcarriers, the active layers 702 and 704 must be disposed at anti nodes403 of the inner light intensity standing wave. In other words, the twoactive layers are disposed at a position one fifth of 1700 nm and aposition two fifth of 1700 nm from one end, respectively, and the n-typelayer is disposed in a smaller region (the left-hand side region in FIG.8) and the p-type layer is disposed in a larger region (the right-handside region in FIG. 8).

The actual examples will be described in detail below while consideringthe above-described conditions.

Each of the first and second active layers 702 and 704 includes four 6nm GaInP quantum wells and three 6 nm Al_(0.25)Ga_(0.25)In_(0.5)Pbarrier layers and has an actual thickness of 42 nm. Since therefractive indices of the GaInP layer and theAl_(0.25)Ga_(0.25)In_(0.5)P layer are 3.56 and 3.37, respectively, at680 nm, the optical thickness of each active layer is 146 nm.

It is necessary that the sum of one half of the optical thickness of theactive layer region (73 nm) and the optical thicknesses of the undopedAl_(0.25)Ga_(0.25)In_(0.5)P barrier layer 304 and the n-typeAl_(0.35)Ga_(0.15)In_(0.5)P layer 303 be 340 nm.

Thus, the undoped Al_(0.25)Ga_(0.25)In_(0.5)P barrier layer 304 isformed to have a thickness of 20 nm, and the n-typeAl_(0.35)Ga_(0.15)In_(0.5)P layer 303 is formed to have a thickness of60.5 nm. Since the refractive indices of the layers 304 and 303 are 3.37and 3.30, respectively, the total optical thickness of these two layersis 267 nm. The sum of 267 nm and one half of the optical thickness ofthe first active layer 702, i.e., 73 nm, is 340 nm.

In other words, as shown in FIG. 8, the center of the first active layer702 aligns with an anti node 403 of the standing wave. Next, it isnecessary that the sum of one half of the optical thickness of the firstactive layer 702 (73 nm), the optical thickness of theAl_(0.25)Ga_(0.25)In_(0.5)P intermediate barrier layer 703, and one halfof the optical thickness of the second active layer 704 (73 nm) be 340nm.

Since the refractive index of the Al_(0.25)Ga_(0.25)In_(0.5)Pintermediate barrier layer 703 is 3.37, the thickness thereof should be57.6 nm to make the optical thickness of the Al_(0.25)Ga_(0.25)In_(0.5)Pintermediate barrier layer 703 194 nm. The sum of 194 nm, 73 nm, and 73nm is 340 μm. Thus, the center of the second active layer 704 alignswith another anti node 403 of the standing wave, as shown in FIG. 8.

Alternatively, a portion of the Al_(0.25)Ga_(0.25)In_(0.5)P intermediatebarrier layer 703 may be doped with magnesium or zinc to make the layerp-type so that the hole injection efficiency to the first active layer702 can be enhanced.

At the p-side, it is necessary that the sum of one half of the opticalthickness of the second active layer 704 (73 nm), and the opticalthicknesses of the undoped Al_(0.25)Ga_(0.25)In_(0.5)P barrier layer 306and the p-type Al_(0.5)In_(0.5)P layer 705 be the remainder, i.e., 1020nm.

The barrier layer 306 is formed to have a thickness of 20 nm, and thep-type Al_(0.5)In_(0.5)P layer 705 is formed to have a thickness of273.2 nm. Since the refractive indices of the layers 306 and 705 are3.37 and 3.22, respectively, the total optical thickness of these twolayers is 947 nm. The sum of 947 nm and one half of the opticalthickness of the second active layer 704 is 1020 nm. The opticalthickness of the n-type layer including the undoped barrier layer, thetotal optical thickness of the two active layers including theintermediate barrier layer, and the optical thickness of the p-typelayer including the undoped barrier layer are 267 nm, 486 nm, and 947nm, respectively. The total is 1700 nm, which corresponds to the opticalthickness of a 2.5 wavelength resonator. In addition, the p-type AlGaInPlayer has a thickness of 273.2 nm, which is in the range of 100 nm ormore and 350 nm or less.

Multilayer film reflectors are formed at the both sides of theresonator. Both n-side and p-side multilayer film reflectors arearranged so that the interfaces between the resonator and the multilayerfilm reflectors align with the anti nodes of the standing wave.

To be specific, layers composed of a material having a low refractiveindex, i.e., an AlAs layer 801 at the n-side and an Al_(0.9)Ga_(0.1)Aslayer 402 at the p-side, are in contact with the resonator.Al_(0.5)Ga_(0.5)As layers 401 are disposed adjacent to the layers 801and 402 at the n-side and the p-side. A required number of pairs (36pairs at the p-side and 60 pairs at the n-side) is repeated at eachside.

Then, as described in the example 1, an element may be formed or anarray of elements may be formed.

Example 3

Example 3 of a red surface emitting laser element applied to a redsurface emitting laser array will now be described. FIGS. 9A and 9B showa structure of an electrophotographic image forming device including ared surface emitting laser array of this example. FIG. 9A is a top viewof the image forming device and FIG. 98 is a side view of the device.

The image forming device shown in FIG. 9 includes a photosensitivemember 900, a charger 902, a developer 904, a transfer charger 906, afixer 908, a rotating multifaceted mirror 910, a motor 912, a redsurface emitting laser array 914, a reflector 916, a collimator lens920, and an f-θ lens 922.

In FIGS. 9A and 9B, the motor 912 rotates the rotating multifacetedmirror 910. The rotating multifaceted mirror 910 of this example has sixreflection planes.

The red surface emitting laser array 914 is the light source forrecording. The red surface emitting laser array 914 is turned ON and OFFby a laser driver (not shown in the drawing) according to video signals.The modulated laser beams are applied to the rotating multifacetedmirror 910 from the red surface emitting laser array 914 through thecollimator lens 920.

The rotating multifaceted mirror 910 rotates in the direction of thearrow. A laser beam output from the red surface emitting laser array 914is reflected at the rotating multifaceted mirror 910 to form a deflectedbeam in which the angle of deflection is continuously varied due to therotation of the multifaceted mirror 910. This reflected light iscorrected for distortion and the like by the f-θ lens 922, reflected bythe reflector 916, and irradiates the photosensitive member 900 whilescanning the photosensitive member 900 in the main scanning direction.Reflection of the beam deflected by one facet of the rotatingmultifaceted mirror 910 forms an image corresponding to a plurality oflines corresponding to the red surface emitting laser array 914 in themain scanning direction. In this example, a 4-by-8 red surface emittinglaser array is used, and an image corresponding to four lines issimultaneously formed.

The photosensitive member 900 is charged in advance with the charger902. The photosensitive member 900 is sequentially exposed by scanningof the laser beam to form an electrostatic latent image. Thephotosensitive member 900 is rotated in the direction of the arrow. Theelectrostatic latent image is developed with the developer 904, and theresulting visible image is transferred to a transfer paper (not shown inthe drawing) with the transfer charger 906. The transfer paper ontowhich the visible image has been transferred is fed to the fixer 908 tofix the image, and then discharged outside the system.

Although a 4-by-8 red surface emitting laser array is used in theexample, other types of arrays may be used. For example, m×n red surfaceemitting laser array (m, n: natural number) may be used.

As described above, an image forming device achieving high-speed,high-precision printing can be formed by using the red surface emittinglaser array in an electrophotographic image-forming device.

In some cases, such as in the case where the element is applied to thelight source of the electrophotographic device, a laser operation isrequired up to 60° C. while achieving a single transverse mode. Ingeneral, in order to achieve the single transverse mode, the emissionregion must be narrowed (4 μm or less in diameter). Even when the amountof injection current is the same, the actual current density increases,and the leakage current also increases.

According to this embodiment, a novel red surface emitting laser elementwith improved temperature characteristics is provided.

An example of a laser display incorporating a laser element 1201 of thisexample is shown in FIG. 11. In FIG. 11, the laser display includes afirst deflecting unit 1202 and a second deflecting unit 1211. Thescanning trajectory on the second deflecting unit 1211 formed by thefirst deflecting unit 1202 is represented by reference numeral 1210.Reference numeral 1212 denotes light deflected by the second deflectingunit 1211, 1213 denotes a particular plane, 1214 denotes a range in theplane 1213 scanned by the deflected light, and 1215 schematically showsthe trajectory of the scanning line on the plane 1213. In addition,reference numeral 1203 indicates the light direction of the laserelement 1201. Reference numeral 1205 and 1206 indicate the deflectedlight directions.

The first deflecting unit 1202 and the second deflecting unit 1210respectively deflect light in the horizontal direction and verticaldirection. As a result, the region scanned by the deflected lightbecomes two dimensional.

Example 4

Example 4 will now be described. In Example 4, a periodic gain structureincluding two multi quantum well structures is employed. This structureincreases the optical confinement ratio and mode gain, and high emissionoutput can be easily obtained.

In addition to the periodic gain structure described above, a 2wavelength resonator is used as shown in FIG. 10 to adjust the thicknessof the p-type AlGaInP layer to 100 or more and 350 nm or less.

The layer structure of the resonator will now be described withreference to FIG. 10.

Since the resonant wavelength is 680 nm and the cavity length is 2wavelength, the optical thickness is 1360 nm. All layers in theresonator are composed of AlGaInP, but AlGaInP materials with differentcompositional ratios are used for the active layer, barrier layer, andspacer layer. Thus, the thickness of each layer must be determinedaccording to the refractive index so that the cavity length is 2wavelength. Moreover, in order to maximize the interaction between lightand carriers, the active layers 702 and 704 must be aligned with theanti nodes of the inner light intensity standing wave. In particular,the active layers are disposed at a position ¼ of 1360 nm and a position½ of 1360 nm from one end, respectively, and the n-type layer isdisposed in a smaller region (the left-hand side in FIG. 10), and thep-type layer is disposed in a larger region (the right-hand side in FIG.10).

The actual examples will be described in detail below while consideringthe above-described conditions.

Each of the first and second active layers 702 and 704 includes four 6nm GaInP quantum wells and three 6 nm Al_(0.25)Ga_(0.25)In_(0.5)Pbarrier layers and has an actual thickness of 42 nm.

Since the refractive indices of the GaInP layer and theAl_(0.25)Ga_(0.25)In_(0.5)P layer at a wavelength of 680 nm are 3.56 and3.37, respectively, the optical thickness of each active layer is 146nm. It is necessary that the sum of one half the optical thickness ofthe active layer region (73 nm), and optical thicknesses of the undopedAl_(0.25)Ga_(0.25)In_(0.5)P barrier layer 304 and the n-typeAl_(0.35)Ga_(0.15)In_(0.5)P layer 303 be 340 nm.

The undoped Al_(0.25)Ga_(0.25)In_(0.5)P barrier layer 304 is formed tohave a thickness of 20 nm, and the n-type Al_(0.35)Ga_(0.15)In_(0.5)Player 303 is formed to have a thickness of 60.5 nm. Since the refractiveindices of the layers 304 and 303 are 3.37 and 3.30, respectively, thetotal optical thickness of these two layers is 267 nm. The sum of 267 nmand one half of the optical thickness of the first active layer 702 (73nm) is 340 nm. In other words, as shown in FIG. 10, the center of thefirst active layer 702 aligns with the anti node 403 of the standingwave. Next, it is necessary that the sum of one half of the opticalthickness of the first active layer 702 (73 nm), the optical thicknessof the Al_(0.25)Ga_(0.25)In_(0.5)P intermediate barrier layer 703, andone half of the optical thickness of the second active layer 704 (73 nm)be 340 nm. Since the refractive index of the Al_(0.25)Ga_(0.25)In_(0.5)Pintermediate barrier layer 703 is 3.37, the thickness of the layer 703should be 57.6 nm so that the optical thickness of the intermediatebarrier layer 703 is 194 nm. The aforementioned total will then be 340nm. Thus, the center of the second active layer 704 also aligns with theanti node 403 of the standing wave, as shown in FIG. 10. Alternatively,a portion of the AlGaInP intermediate barrier layer 703 may be dopedwith magnesium or zinc to make the layer p-type so as to enhance thehole injection efficiency to the first active layer 702.

At the p-side it is necessary that the sum of one half of the opticalthickness of the second active layer 704 (73 nm) and the opticalthicknesses of the undoped Al_(0.25)Ga_(0.25)In_(0.5)P barrier layer 306and the p-type Al_(0.5)In_(0.5)P layer 705 be the remainder, i.e., 680nm. When the barrier layer 306 has a thickness of 20 nm and the p-typeAl_(0.5)In_(0.5)P layer 705 has a thickness of 167.6 nm, the totaloptical thickness of the two layers is 607 nm since the refractiveindices of the layers 306 and 705 are 3.37 and 3.22, respectively. Thesum of 607 mm and 73 nm, which is one half of the optical thickness ofthe second active layer 704, is 680 nm. The optical thickness of then-type layer including the undoped barrier layer, the total opticalthickness of the two active layers including the intermediate barrierlayer, and the optical thickness of the p-type layer including theundoped barrier layer are 267 nm, 486 nm, and 607 nm, respectively. Thesum is 1360 nm, which corresponds to the optical thickness of a 2wavelength resonator. The thickness of the p-type AlGaInP layer is 167.6nm, which is in the range of 100 nm or more and 350 nm or less.Multilayer film reflectors are formed at the both sides of theresonator. Both n-side and p-side multilayer film reflectors arearranged so that the interfaces between the resonator and the multilayerfilm reflectors align with the anti nodes of the standing wave. To bespecific, layers composed of a material having a low refractive index,i.e., an AlAs layer 801 at the n-side and an Al_(0.9)Ga_(0.1)As layer402 at the p-side, are in contact with the resonator. Al_(0.5)Ga_(0.5)Aslayers 401 are disposed adjacent to the layers 801 and 402 at the n-sideand the p-side. A required number of pairs (36 pairs at the p-side and60 pairs at the n-side) is repeated at each side.

Example 5

FIG. 12 is a graph showing the relationship (solid line) between themaximum output of a red surface emitting laser having a multilayerstructure described in this embodiment and the ambient temperature. Thered surface emitting laser has a structure shown in FIG. 10 describedwith reference to FIG. 10. The p-type semiconductor spacer layer 705 isa p-type Al_(0.5)In_(0.5)P layer (thickness: 167.6 nm). Note that thelayer 801 in FIG. 10 is composed of Al_(0.9)Ga_(0.1)As instead of AlAs.In FIG. 12, the dotted line shows the characteristic of an element inwhich the p-type semiconductor spacer layer is composed ofAl_(0.35)Ga_(0.15)In_(0.5)P and has a thickness of 60.5 nm while therest of the layer structure remains the same as that of the elementindicated by the solid line in the graph.

As described above, the amount of leakage current tends to increase withthe ambient temperature, and the optical output tends to decrease withincreasing ambient temperature. Whereas emission from an element ofrelated art (dotted line in FIG. 12) stops at an ambient temperature of75.2° C., the laser element of this embodiment achieve emission up to84.1° C. When the maximum outputs of two elements at 60° C. arecompared, the maximum output of the element of this embodiment is largerthan that of the related art by about 40%. In other words, with theelement of this embodiment, the leakage current is reduced and a redsurface emitting laser capable of high-temperature operation can beachieved.

It should be noted here that an AlAs layer having a low thermalresistance can be used as a low refractive index layer constituting thelower DBR disposed at the substrate side. In such a case, the heatgenerated inside the laser element can escape easily, and temperatureincrease inside the element can be suppressed.

Table 1 shows examples of p-type spacer layers with various thicknesses.In the table, an Al_(0.5)In_(0.5)P layer is used as the p-type spacerlayer, an Al_(0.35)Ga_(0.15)In_(0.5)P layer is used as the n-type spacerlayer, and an Al_(0.25)Ga_(0.25)In_(0.5)P layer is used as the undopedbarrier layers at each of the p-side and n-side. When a quadrupleGa_(0.5)In_(0.5)P/Al_(0.25)Ga_(0.25)In_(0.5)P quantum well is used asthe active layer, the thickness is 42 nm. When a periodic gain structureis used, the thickness including the intermediate undoped barrier layeris 141.6 nm for a double periodic gain structure and the thickness is241.2 nm including two intermediate undoped barrier layers for a tripleperiodic gain structure.

In Examples 1, 2, and 4, the thickness of the p-type spacer layer is167.6 nm or 273.2 nm. However, as shown in Table 1, the thickness of thep-type spacer layer can be adjusted to a desired value (100 nm or moreand 350 nm or less) by adequately adjusting the cavity length and thethicknesses of the active layer, the undoped barrier layer, and then-type spacer layer.

When the cavity length is required to be an integral multiple of onehalf of the designed wavelength and the center of the active layer isrequired to align with an anti-node of the standing wave, the thicknessof the p-type spacer does not take a continuous value. As shown in Table1, it is possible to adjust the thickness of the p-type spacer layer tosome extent within the range defined by the present invention byadjusting the thickness of the undoped barrier layer.

TABLE 1 P-side N-side Active P-type spacer undoped N-type spacer undopedlayer layer barrier layer layer barrier layer Cavity thickness thicknessthickness thickness thickness length (nm) (nm) (nm) (nm) (nm)(wavelength) Ref. 1 42.0 100.0 84.6 60.5 20 1.5 2 42.0 150.0 36.8 43.336.8 1.5 3 42.0 167.6 20 60.5 20 1.5 FIG. 4 4 42.0 273.2 20 60.5 20 2 5141.6 167.6 20 60.5 20 2 FIG. 10 6 42.0 300.0 95.2 60.5 20 2.5 7 42.0350.0 47.5 32.4 47.5 2.5 8 141.6 273.2 20 60.5 20 2.5 FIG. 8 9 42.0237.2 20 163.5 20 2.5 10 42.0 350.0 47.5 135.4 47.5 3 11 141.6 350.047.5 60.5 20 3 12 141.6 252.2 40 143.1 40 3 13 141.6 252.2 40 246.1 403.5 14 141.6 350.0 47.5 135.4 47.5 3.5 15 141.6 350.0 47.5 238.4 47.5 416 241.2 252.2 40 246.1 40 4

While the present invention has been described with reference toexemplary embodiments, it is to be understood that the invention is notlimited to the disclosed exemplary embodiments. The scope of thefollowing claims is to be accorded the broadest interpretation so as toencompass all such modifications and equivalent structures andfunctions.

This application claims the benefit of Japanese Patent Application No.2007-033788, filed in Feb. 14, 2007, and Japanese Patent Application No.2008-024485, filed in Feb. 4, 2008, which are hereby incorporated byreference herein in their entirety.

1-20. (canceled)
 21. A red surface emitting laser element comprising: afirst reflector; a second reflector including a p-type semiconductormultilayer film; an active layer between the first reflector and thesecond reflector; a p-type semiconductor spacer layer between the activelayer and the second reflector, wherein the p-type semiconductor spacerlayer has a thickness of 100 nm or more and 350 nm or less; and anotherspacer layer between the p-type semiconductor spacer layer and theactive layer, wherein the another spacer layer is a semiconductor layerhaving a impurity concentration lower than that of the p-typesemiconductor spacer layer.
 22. The red surface emitting laser elementaccording to claim 21, wherein the another spacer layer is an undopedsemiconductor layer.
 23. The red surface emitting laser elementaccording to claim 21, wherein the p-type semiconductor spacer layercontains aluminum, indium, and phosphorus.
 24. The red surface emittinglaser element according to claim 21, wherein the p-type semiconductorspacer layer contains AlxGayIn1−x−yP (0.45 x+y 0.55, 0.25 x 0.55, 0 y0.30).
 25. The red surface emitting laser element according to claim 24,wherein the p-type semiconductor spacer layer contains AlxGayIn1−x−yP(0.50 x+y 0.52, 0.35 x 0.52, 0 y 0.17).
 26. The red surface emittinglaser element according to claim 21, wherein the p-type semiconductormultilayer film contains aluminum and arsenic.
 27. The red surfaceemitting laser element according to claim 21, wherein the p-typesemiconductor multilayer film includes a plurality of pairs of layersstacked, each pair including a first layer and a second layer havingdifferent refractive indices; and wherein at least one of the firstlayer and the second layer contains aluminum, gallium, and arsenic. 28.The red surface emitting laser element according to claim 21, whereinthe second reflector is composed of a semiconductor material having alattice matching with GaAs.
 29. The red surface emitting laser elementaccording to claim 21, wherein the active layer is a quantum well activelayer including a layer composed of GaInP and a layer composed ofAlGaInP.
 30. The red surface emitting laser element according to claim21, wherein the first reflector includes an n-type semiconductormultilayer film, and the red surface emitting laser element furthercomprises an n-type semiconductor spacer layer between the firstreflector and the active layer.
 31. The red surface emitting laserelement according to claim 21, wherein the active layer, the p-typesemiconductor spacer layer, and the n-type semiconductor spacer layerconstitute a resonator, and the resonator has an asymmetrical structurein which the active layer is not located at the center of the resonatorin a cavity length direction.
 32. The red surface emitting laser elementaccording to claim 31, wherein a thickness of the p-type semiconductorspacer layer is larger than a thickness of the n-type semiconductorspacer layer.
 33. The red surface emitting laser element according toclaim 21, wherein a cavity length of a resonator including the activelayer is 1.5 wavelength or more and 4 wavelength or less.
 34. A redsurface emitting laser element comprising: a first reflector; a secondreflector including a p-type AlGaAs semiconductor multilayer film; anactive layer between the first reflector and the second reflector; ap-type AlInP semiconductor spacer layer or a p-type AlGaInPsemiconductor spacer layer having a thickness of 100 nm or more and 350nm or less between the active layer and the second reflector; andanother spacer layer between the p-type semiconductor spacer layer andthe active layer, wherein the another spacer layer is a semiconductorlayer having a impurity concentration lower than that of the p-typesemiconductor spacer layer.
 35. A red surface emitting laser elementcomprising: a first reflector; a second reflector including a p-typesemiconductor multilayer film; an active layer between the firstreflector and the second reflector; a p-type semiconductor spacer layerbetween the active layer and the second reflector; and another spacerlayer between the p-type semiconductor spacer layer and the activelayer, wherein the another spacer layer is a semiconductor layer havinga impurity concentration lower than that of the p-type semiconductorspacer layer, wherein a conduction band edge of the p-type semiconductormultilayer film at X point is lower than a conduction band edge of thep-type semiconductor spacer layer, and a thickness of the p-typesemiconductor spacer layer is 100 nm or more and 350 nm or less.
 36. Animage-forming device comprising: the red surface emitting laser elementaccording to claim 21; and a deflector for reflecting a laser beamoutput from the laser element to conduct scanning.
 37. The image-formingdevice according to claim 36, further comprising: a photosensitivemember for forming an electrostatic latent image by a beam deflected atthe deflector; a charger; a developer; and a fixer.